NanoFabrication Systems / Instrumentation

Instrumentation

Research Platform Enabling Dip Pen Nanolithography® (DPN®)

NSCRIPTOR™ DPN® System

NanoInk's NSCRIPTOR™ DPN® System enables dedicated DPN experiments based on a fully functional commercial scanning probe microscope (SPM) system. Leveraging these scanning probe capabilities, the NSCRIPTOR is optimized for both nanolithography and subsequent image acquisition. NSCRIPTOR is a complete package solution, including a PC, instrument controllers, air table, and environmental chamber. Far beyond a standard atomic force microscope, this turnkey system uniquely leverages NanoInk's MEMS offerings (1D and 2D probe arrays, microfluidic Inkwells, Active Pens™) and provides the following critical features for DPN experimentation:

Nanoscale Registry and Alignment

  • Integrated SPM and video optical microscope images create alignment maps, which enable features to be found and aligned in under 5 minutes, a process which normally takes several hours
  • Nanoscale alignment wizard aides multi-layer patterning and is also used for contact mode patterning with subsequent AC mode imaging, which is an excellent efficiency tool
  • Capable of patterning 14 nm line widths, feature pitches down to 20 nm, and placement precision better than 10 nm
  • Integrated video for navigation and sample bookmarking
  • All data (SPM images, video optical microscope, alignments) are stored in virtual-lab-book alignment databases

Customized CAD tool capability uniquely made for DPN pattern design

  • Layered hierarchy, as with IC-design CAD packages, enables GDS II CAD file import into the InkCAD™ design software
  • Multi-layer writing routines for multi-ink lithography
  • Models large-scale patterning through multi-pen lithography visualization

Functions as an excellent stand-alone atomic force microscope and allows imaging and DPN patterning capability with both contact and AC modes

  • Six channels of data: Contact and AC modes with forward and reverse images for lateral force microscopy (LFM), topography, and error, as well as two additional data channels available for auxiliary signal imaging
  • Point-and-click imaging with on-screen, real-time measurement tools

Closed loop linearized scanner design which is critical for consistent nanolithography and imaging

  • Excellent linearity and low thermal drift
  • Scanning tip SPM design enables substrate and sample puck flexibility (such as sample biasing and multiple substrates)

3-motor leveling system critical for use with 1D or 2D probe arrays

  • Specialized software routine creates automatic, geometrically compensated, leveling operations for the probe arrays with respect to the substrate
  • Refined (and tailorable) approach routines for contact and AC mode
  • Software and hardware facilitate easy tip-exchange (magnetic mount)

InkCal™ calibration routine for ink diffusion

  • Wizard automates patterning, imaging, and measurement and automatically calculates diffusion coefficients (linear and nonlinear modeling)
  • Calibrations maintained in ink database management library

Tip-to-Tip alignment wizard for multi-pen patterning

  • Calculates tip-to-tip pitches in X and Y with nanoscale precision
  • Enables multiple inks to be patterned with nanoscale registry in one continuous lithography batch

Control capability for Active Pen arrays

  • Thermally actuated arrays of DPN pens controlled by software can be actuated independently or in groups
  • Enables addressing of surface features cleanly and subsequent patterning is completed without contamination
  • Enables multi-ink lithography without surrounding contamination

Bias control and electrochemical DPN capability

  • Enables tip or sample biasing from -10 to +10 volts
  • Software controlled during lithography

Customized ink-dipping routines for Active Pen and multi-pen arrays

  • Optimized parameters for selective ink delivery from NanoInk's Inkwells

E-Chamber: PC-driven environmental control

  • Temperature and humidity control are crucial for experiment stability and controlling ink diffusion

 

Close-up of the NSCRIPTOR Hardware

See the following pdfs:

NSCRIPTOR™ DPN® System Brochure

NSCRIPTOR™ DPN® System Product Data Sheet

InkCAD™ Software Product Data Sheet


Funding and support for research:

Funding for NanoInk's NSCRIPTORT DPN® System can be obtained from a variety of agencies. This broad source of funding opportunities exists due to the versatility of Dip Pen Nanolithography® with applications extending from the life sciences to the semiconductor industry. For more information, including web links to government organizations that fund research grants for university and government laboratories, as well as small businesses, visit our Grant Resources page in the Information Resources section of the Web site.

For more information or for assistance with your grant proposal, please contact NanoInk by phone at 1-847-679-6266 or e-mail sales@nanoink.net.


DPN Forum:

Visit DPNForum.com to participate in a community of vibrant academic and industrial researchers, utilizing Dip Pen Nanolithography (DPN) technology.